Nonvolatile semiconductor memory device

ABSTRACT

A nonvolatile semiconductor memory device comprises a cell unit including a first and a second selection gate transistor and a memory string provided between the first and second selection gate transistors and composed of a plurality of serially connected electrically erasable programmable memory cells operative to store effective data; and a data write circuit operative to write data into the memory cell, wherein the number of program stages for at least one of memory cells on both ends of the memory string is lower than the number of program stages for other memory cells, and the data write circuit executes the first stage program to the memory cell having the number of program stages lower than the number of program stages for the other memory cells after the first stage program to the other memory cells.

CROSS-REFERENCE TO RELATED APPLICATIONS

This application is a continuation of U.S. application Ser. No.16/431,789 filed Jun. 5, 2019, which is a continuation of U.S.application Ser. No. 15/903,629 filed Feb. 23, 2018, which is acontinuation of U.S. application Ser. No. 15/462,300 filed Mar. 17,2017, which is a continuation of U.S. application Ser. No. 15/166,895filed May 27, 2016, which is a continuation of U.S. application Ser. No.14/707,908 filed May 8, 2015, which is a continuation of U.S.application Ser. No. 14/075,400 filed Nov. 8, 2013, which is acontinuation of U.S. application Ser. No. 13/711,894 filed Dec. 12,2012, which is a continuation of U.S. application Ser. No. 12/724,636filed Mar. 16, 2010, and is based upon and claims the benefit ofpriority from the prior Japanese Patent Application No. 2009-98416,filed on Apr. 14, 2009, the entire contents of each of which areincorporated herein by reference.

BACKGROUND OF THE INVENTION Field of the Invention

The present invention relates to a nonvolatile semiconductor memorydevice, in particular to a NAND-type flash memory.

Description of the Related Art

As an electrically erasable programmable and highly scalable nonvolatilesemiconductor memory device (EEPROM), a NAND-type flash memory has beenknown. The NAND-type flash memory includes a plurality of memory cellsserially connected in such a form that adjacent ones share asource/drain diffused layer to configure a NAND cell unit. Both ends ofthe NAND cell unit are connected to a bit line and a source line viarespective selection gate transistors. Such the configuration of theNAND cell unit makes it possible to achieve a smaller unit cell area andlarger capacity storage than that of the NOR-type.

The memory cell in the NAND-type flash memory includes a charge storagelayer (floating gate) formed on a semiconductor substrate with a tunnelinsulator film interposed therebetween, and a control gate stackedthereon with an inter-gate insulator film interposed therebetween,thereby storing data nonvolatilely in accordance with a charge storagestate of the floating gate. Specifically, for example, a high thresholdvoltage state resulted from injection of electrons into the floatinggate is defined as data “0”, a low threshold voltage state resulted fromrelease of electrons from the floating gate is defined as data “1”, andthe memory cell stores binary data. Recently, a program thresholddistribution is fragmented to achieve multi-valued storage such asfour-valued storage.

The fine fabrication of the flash memory and the fragmentation of theprogram threshold distribution cause the following problems.

Firstly, as for a memory cell adjacent to the selection gate transistor,electrons are injected into the floating gate under the influence of thegate-induced drain leakage current GIDL (Gate-Induced Drain Leakage),and therefore failed write is caused easily.

Secondly, the shorter the distance between memory cells are, thestronger the interference between adjacent cells becomes, for example.This is because scaling in the longitudinal direction is more difficultthan the reduction by scaling in the lateral direction in the cellarray.

More specifically, the floating gate of the memory cell is capacitivelycoupled to the control gate (word line) located above and to thesubstrate (channel) located immediately beneath. When cells arefine-fabricated, the capacity between the floating gate of one memorycell and the floating gate of a memory cell adjacent thereto increasesrelative to the capacity between the floating gate and the control gateand substrate. The inter-cell interference based on the capacitivecoupling between the floating gates of the adjacent cells exerts aninfluence on the threshold of the already data-programmed memory cell sothat the threshold is shifted in accordance with the thresholdfluctuation of a memory cell to be data-programmed later.

As for the first problem, a dummy cell not for use in data storage maybe arranged adjacent to the selection gate transistor. Such a system iseffective to a certain extent (see, for example, Patent Document 1: JP2004-127346A).

Memory cells for multi-valued storage may be used to achieve a largercapacity while memory cells for binary storage may be used only asmemory cells on both ends of a memory string adjacent to the selectiongate transistors to provide the threshold distribution with a margin,thereby improving the reliability as in a technology proposed(Non-Patent Document 1: “16-Gigabit, 8-level NAND Flash Memory with 51nm 44-Cell String Technology”, Tae-Kyung Kim, et al. Solid-State DeviceResearch Conference, 2008. ESSDERC 2008. 38th European).

These measures, however, can not solve the second problem. Inparticular, in the case of the structure as in Non-Patent Document 1,the number of program stages for the memory cells on both ends of thememory string is lower than the number of program stages for othermemory cells. Therefore, it is difficult to recover the fluctuation ofthe threshold distribution caused by the inter-cell interference fromthe adjacent memory cell as a problem.

SUMMARY OF THE INVENTION

In an aspect the present invention provides a nonvolatile semiconductormemory device, comprising: a cell unit including a first and a secondselection gate transistor and a memory string provided between the firstand second selection gate transistors and composed of a plurality ofserially connected electrically erasable programmable memory cellsoperative to store effective data; and a data write circuit operative towrite data into the memory cell, wherein the number of program stagesfor at least one of memory cells on both ends of the memory string islower than the number of program stages for other memory cells, and thedata write circuit executes the first stage program to the memory cellhaving the number of program stages lower than the number of programstages for the other memory cells after the first stage program to theother memory cells.

In another aspect the present invention provides a nonvolatilesemiconductor memory device, comprising: a cell unit including a firstand a second selection gate transistor and a memory string providedbetween the first and second selection gate transistors and composed ofa plurality of serially connected electrically erasable programmablememory cells operative to store effective data; and a data write circuitoperative to write data into the memory cell, wherein the total numberof storage bits in the memory string is a power of 2, and the number ofstorage bits in at least one of memory cells on both ends of the memorystring is lower than the number of storage bits in other memory cells,and the data write circuit, on writing data into the memory string,executes the first stage program to a certain memory cell adjacent tothe memory cell having the lower number of storage bits, and thenexecutes a program to the memory cell having the lower number of storagebits, adjacent to the certain memory cell.

In yet another aspect the present invention provides a nonvolatilesemiconductor memory device, comprising: a cell unit including a firstand a second selection gate transistor and a memory string providedbetween the first and second selection gate transistors and composed ofa plurality of serially connected electrically erasable programmablememory cells operative to store effective data; and a data write circuitoperative to write data into the memory cell, wherein the number ofprogram stages for at least one of memory cells on both ends of thememory string is lower than the number of program stages for othermemory cells, and the data write circuit, on writing data into thememory string, after execution of the first program and before executionof the last program to a certain memory cell adjacent to the memory cellhaving the lower number of program stages, executes the first programthrough the last program to the memory cell having the lower number ofprogram stages, adjacent to the certain memory cell.

BRIEF DESCRIPTION OF THE DRAWINGS

FIG. 1 is a diagram showing a configuration of a flash memory accordingto a first embodiment of the present invention.

FIG. 2 is a diagram showing a memory cell array configuration of thesame flash memory.

FIG. 3 is a diagram showing a data assignment in the same flash memory.

FIGS. 4A-4C provide diagrams showing data distribution examples in thesame flash memory.

FIG. 5 is a diagram showing a data program order in the same flashmemory.

FIGS. 6A and 6B provide diagrams showing the inter-cell interferenceeffect in the data program order of FIG. 5.

FIG. 7 is a diagram showing a data program order in a flash memoryaccording to a second embodiment of the present invention.

FIGS. 8A and 8B provide diagrams showing the inter-cell interferenceeffect in the data program order of FIG. 7.

FIG. 9 is a diagram showing a data program order in a flash memoryaccording to a third embodiment of the present invention.

FIGS. 10A and 10B provide diagrams showing the inter-cell interferenceeffect in the data program order of FIG. 9.

FIG. 11 is a diagram showing a data program order in a flash memoryaccording to a fourth embodiment of the present invention.

FIGS. 12A and 12B provide diagrams showing the inter-cell interferenceeffect in the data program order of FIG. 11.

FIGS. 13A and 13B provide diagrams showing data distribution examples ina flash memory according to a fifth embodiment of the present invention.

FIG. 14 is a diagram showing a data program order in the same flashmemory.

FIGS. 15A and 15B provide diagrams showing the inter-cell interferenceeffect in the data program order of FIG. 14.

FIG. 16 provides diagrams showing data distribution examples in a flashmemory according to a sixth embodiment of the present invention.

FIG. 17 is a diagram showing a data program order in the same flashmemory.

FIGS. 18A and 18B provide diagrams showing the inter-cell interferenceeffect in the data program order of FIG. 17.

FIG. 19 is a diagram showing a data program order in a flash memoryaccording to an example for comparison with the first embodiment of thepresent invention.

FIGS. 20A-20C provide diagrams showing the inter-cell interferenceeffect in the data program order of FIG. 19.

FIG. 21 is a diagram showing a data program order in a flash memoryaccording to an example for comparison with the fifth embodiment of thepresent invention.

FIGS. 22A and 22B provide diagrams showing the inter-cell interferenceeffect in the data program order of FIG. 21.

FIG. 23 is a diagram showing a data program order in a flash memoryaccording to an example for comparison with the sixth embodiment of thepresent invention.

FIGS. 24A-24C provide diagrams showing the inter-cell interferenceeffect in the data program order of FIG. 23.

DETAILED DESCRIPTION OF THE EMBODIMENTS

The nonvolatile semiconductor memory device according to the presentinvention will now be described about the embodiments in detail withreference to the drawings.

First Embodiment

FIG. 1 is a block diagram showing a configuration of a NAND-type flashmemory according to a first embodiment of the present invention. ThisNAND-type flash memory comprises a NAND chip 10, and a controller 11operative to control the NAND chip 10.

A memory cell array 1 contained in the NAND chip 10 includes a pluralityof memory cells MC of the floating gate type arrayed in matrix asdescribed later. A row decoder/word line driver 2 a, a column decoder 2b, a page buffer 3 and a high voltage generator 8 configure a datawrite/read circuit operative to execute data write and read to thememory cell array 1 on a page basis. The row decoder/word line driver 2a drives word lines and selection gate lines in the memory cell array 1.The page buffer 3 includes sense amplifier circuits and data holdingcircuits for 1 page to execute data read and write to the memory cellarray 1 on a page basis.

The read data for 1 page in the page buffer 3 is column-selected inorder by the column decoder 2 b and provided to an external I/O terminalvia an I/O buffer 9. Write data fed from the I/O terminal is selected bythe column decoder 2 b and loaded in the page buffer 3. Write data for 1page is loaded in the page buffer 3. Row and column address signals arereceived via the I/O buffer 9 and transferred to the row decoder 2 a andto the column decoder 2 b, respectively. A row address register 5 aholds an erase block address on erasing, and a page address onprogramming and reading. A column address register 5 b receives a startcolumn address for write data loading before the beginning of writing,and a start column address for reading. The column address register 5 bholds the input column address until a write enable/WE or a readenable/RE is toggled under a certain condition.

A logic control circuit 6 controls the input of commands and addressesand the input/output of data based on a chip enable signal/CE, a commandenable signal CLE, an address latch enable signal ALE, a write enablesignal/WE, a read enable signal/RE and so forth. Reading and writing canbe executed in accordance with the commands. On receipt of a command, asequence control circuit 7 executes a sequence control on reading,writing or erasing. The high voltage generator 8 is controlled by thecontrol circuit 7 to generate voltages required for various operations.

The controller 11 executes control on data write and read under acondition appropriate to the current programmed state in the NAND chip10. A part of later-described read control may be executed in the NANDchip 10, needless to say.

FIG. 2 shows a specific configuration of the cell array 1. In thisexample, a memory string MSTR composed of 86 serially connected memorycells MC0-MC85, and selection gate transistors S1, S2 connected to bothends thereof configure a NAND cell unit 4. The selection gate transistorS1 has a source connected to a common source line CELSRC, and theselection gate transistor S2 has a drain connected to a bit line BL(BL0-BL_(i−1)). The memory cells MC0-MC85 have control gates connectedto word lines (WL0-WL85), respectively. The selection gate transistorsS1, S2 have gates connected to selection gate lines SGS, SGD.

As shown in FIG. 2, dummy word lines DWL1, DWL2 having a structure equalto the word line WL and dummy cells DC1, DC2 having a structure equal tothe memory cell MC may be provided between the memory string MSTR andthe selection gate transistors S1, S2, respectively, if required. Inthis case, the influence of the gate-induced drain leakage current GIDLexerted from the selection gate transistors S1, S2 can be relieved.Therefore, it is possible to enhance the disturb resistance of thememory cells MC0, MC85 arranged on both ends of the memory string MSTR.

A range of plural memory cells MC along one word line WL is referred toas a page that is a unit of simultaneous data read and data write.Hereinafter, a page including plural memory cells MCi along one wordline WLi (i=0−85) may be expressed as a page <i>. A range of plural NANDcell units 4 aligned in the word line WL direction configures a cellblock BLK that is a unit of data simultaneous erase. In FIG. 2, pluralcell blocks BLK0-BLK_(m−1) sharing the bit line BL are aligned in thebit line BL direction to configure the cell array 1.

The word lines WL and the selection gate lines SGS, SGD are driven bythe row decoder 2 a. The bit lines BL are connected to the senseamplifier circuits SA (SA0-SA_(i−1)) in the page buffer 3.

FIG. 3 is a diagram showing a data assignment in the memory cell arrayshown in FIG. 2.

The memory string MSTR in the NAND-type flash memory comprises 86 memorycells MC, most of which can store 3 bits. From the viewpoint of anaffinity for computers, the number of storage bits in at least one ofthe memory cell MC0 adjacent to the selection gate transistor S1 and thememory cell MC85 adjacent to the selection gate transistor S2 is madelower than 3 bits so that the total number of storage bits in the memorystring MSTR equals a power of 2.

In the case 1 of FIG. 3, 1-bit data is assigned to the memory cell MC0closest to the selection gate transistor S1 (D1), and 3-bit data isassigned to other memory cells MC1-MC85 (D3).

In the case 2, 1-bit data is assigned to the memory cell MC85 closest tothe selection gate transistor S2 (D1), and 3-bit data is assigned toother memory cells MC0-MC84 (D3).

In the case 3, 2-bit data is assigned to the memory cells MC0 and MC85(D2), and 3-bit data is assigned to other memory cells MC1-MC84 (D3).

In any one of the above cases, the total number of storage bits in thememory string MSTR equals a power of 2, that is, 256 bits.

In the present embodiment the following description handles the flashmemory with the data assignment of the case 1.

Next, operation of the present embodiment thus configured is described.

In the following description, the “page” has 2 different meanings andaccordingly caution must be taken.

The first is a “page” as a unit of simultaneous data access along oneword line.

The second is a “page” indicative of a hierarchy of storage data whenmulti-valued data is stored in one memory cell, that is, a programstage. In this case, it is referred to as L (Lower) page, M (Middle)page, U (Upper) page and so forth.

FIGS. 4A-4C provide diagrams showing data distribution examples in thememory cells MC when 3-bit data program is executed in three programstages.

The memory cells MC have been data-erased previously by block erase tobring the thresholds of all memory cells MC in the block to thelowermost “0” level.

In the case of FIG. 4A, in the first stage program (1st stage), L pageprogram is executed in accordance with the data to pull up the thresholdof L page data “0” to “1”. In FIG. 4, L page data “0” and “1”corresponds to binary data 1 and 0, respectively.

Subsequently, in the second stage program (2nd stage), M page program isexecuted in accordance with L page data “0” or “1” to generate thresholddistributions of M page data “0” or “1”, “2”, “3”. In FIGS. 4A-4C, Mpage data “0”, “1”, “2” and “3” corresponds to binary data 11, 01, 00and 10, respectively.

Finally, in the third stage program (3rd stage), U page program isexecuted in accordance with M page data “0” or “1”-“3” to generatethreshold distributions of U page data “0” or “1”-“7”. In FIG. 4, U pagedata “0”, “1”, “2”, “3”, “4”, “5”, “6” and “7” corresponds to binarydata 111, 011, 001, 101, 100, 000, 010, 110, respectively, as anexample.

In the case of FIG. 4B, in the first stage program (1st stage), L pageprogram is executed to pull up the threshold of L page data “0” to “1”as in the case of FIG. 4A.

Subsequently, in the second stage program (2nd stage), M page and U pagerough program is executed, thereby generating U page data “0” or “1”-“7”in accordance with L page data “0” or “1”. At this time, the thresholddistributions of U page data “1”-“7” overlap adjacent thresholddistributions, respectively.

Finally, in the third stage program (3rd stage), M page and U page fineprogram is executed, thereby narrowing the threshold distributions of Upage data “1”-“7” overlapped after the second stage program to separatethem definitely.

In the case of FIG. 4C, in the first stage program (1st stage), L pageand M page program is executed, thereby generating thresholddistributions of M page data “0”-“3” in accordance with L page data “0”.

Subsequently, in the second stage program (2nd stage), U page roughprogram is executed, thereby generating threshold distributions of Upage data “0”-“7” in accordance with M page data “0”-“3”. At this time,the threshold distributions of U page data “1”-“7” overlap adjacentthreshold distributions, respectively.

Finally, in the third stage program (3rd stage), U page fine program isexecuted, thereby narrowing the threshold distributions of U page data“1”-“7” overlapped after the second stage program to separate themdefinitely.

In any one of FIGS. 4A-4C, the threshold distributions in the memorycell MCi after each program stage are widened under the inter-cellinterference effect caused by programs to be executed later to adjacentmemory cells MCi−1 and i+1. This effect can be corrected to some extentby the subsequent program to the memory cell MCi. On the other hand, theinfluence exerted from one inter-cell interference differs in accordancewith the numbers of program stages for the adjacent memory cells MCi−1and MCi+1. For example, in any one of FIGS. 4A-4C, with respect to thethird stage program, the applied electrical energy is relatively low.Therefore, the influence of the inter-cell interference caused by theprogram becomes relatively lower than those at the time of programmingin the first stage and the second stage.

The following description is given to a data program order for theNAND-type flash memory configured as above.

First, prior to description of the data program order in the presentembodiment, a data program order for a flash memory in a comparisonexample is described with reference to FIGS. 19 and 20A-20C.

FIG. 19 is a diagram showing the data program order in the comparisonexample, and FIGS. 20A-20C provide diagrams showing the inter-cellinterference effect in the data program order of FIG. 19. This exampleshows that 1-bit data is programmed in one program stage for a pageincluding the memory cell MC0 connected to the word line WL0 while 3-bitdata is programmed in three program stages for a page including thememory cells MC1-MC85. (In the following description, a page includingthe memory cell MCk (k=an integer of 0-85) connected to the word lineWLk is represented by the “page<k>”.) A mark x in FIGS. 20A-20Cindicates that the inter-cell interference effect arises. For example,in the case of FIG. 20A, it indicates that the first stage program to apage <1> exerts the inter-cell interference effect on the thresholddistributions after the first stage program to an adjacent page <0>.

The program to 1 block is finished through 256 times programming.

Firstly, in the first programming, the first stage program is executedto the page <0> closest to the selection gate transistor S1.

The first programming herein refers to first programming after erase fora block and corresponds, for example, to programming executed firstafter the block, to which the program-target page belongs, varies duringthe process of 2-block data program.

Subsequently, in the second programming, the first stage program isexecuted to the page <1>. As a result, the threshold distributions afterthe first stage program to the page <1> adjacent to the page <0>fluctuate in accordance with the inter-cell interference as shown inFIG. 20A.

Subsequently, in the third programming, the first stage program isexecuted to the page <2>. As a result, the threshold distributions afterthe first stage program to the page <1> adjacent to the page <2>fluctuate in accordance with the inter-cell interference as shown inFIG. 20B.

Subsequently, in the fourth programming, the second stage program isexecuted to the page <1>. As a result, the threshold distributions afterthe first stage program to the page <0> adjacent to the page <1> and thethreshold distributions after the first stage program to the page <2>fluctuate in accordance with the inter-cell interference as shown inFIGS. 20A and 20C.

Subsequently, in the 5-253th programming, the first stage program to thepage <k>, the second stage program to the page <k−1> and the third stageprogram to the page <k−2> are executed in order within a range ofk=5-85. As a result, the threshold distributions after the i-th (i=aninteger of 1-3) stage program to the certain page <k> fluctuate inaccordance with the inter-cell interference caused by the (i+1)-th(except i=3) stage program to the page <k−1> and the i-th stage programto the page <k+1> as shown in FIG. 20C.

Finally, in the 254-256th programming, the second stage program to thepage <85>, the third stage program to the page <84> and the third stageprogram to the page <85> are executed in order.

Next, a data program order in the present embodiment is described withreference to FIGS. 5 and 6A, 6B.

FIG. 5 is a diagram showing the data program order in the presentembodiment, and FIGS. 6A and 6B provide diagrams showing the inter-cellinterference effect in the data program order of FIG. 5. In FIGS. 6A and6B the inter-cell interference effect on the page <k> (k=an integer of2-85) is similar to FIG. 20C and omitted therefrom.

Firstly, in the first programming, the first stage program is executedto the page <1> other than the page <0> closest to the selection gatetransistor S1.

Subsequently, in the second programming, the first stage program isexecuted to the page <2>. As a result, the threshold distributions afterthe first stage program to the page <1> adjacent to the page <2>fluctuate in accordance with the inter-cell interference as shown inFIG. 6B.

Subsequently, in the third programming, the second stage program isexecuted to the page <1>. As a result, the threshold distributions afterthe first stage program to the page <2> adjacent to the page <1>fluctuate in accordance with the inter-cell interference as shown inFIG. 20C.

Subsequently, in the fourth programming, the first stage program isexecuted to the page <0> closest to the selection gate transistor S1. Asa result, the threshold distributions after the second stage program tothe page <1> adjacent to the page <0> fluctuate in accordance with theinter-cell interference as shown in FIG. 6B.

As for the 5-256th programming, they are similar to those in thecomparison example shown in FIG. 19 and accordingly omitted from thefollowing description.

In the present embodiment, the memory cell MC0 in the page <0> closestto the selection gate transistor S1 is designed to have the number ofstorage bits equal to 1 bit, thereby improving the disturbcharacteristic at the time of programming.

In the case of the comparison example shown in FIG. 19, the thresholddistributions after the first stage program to the page <0> aresusceptible to the inter-cell interference caused by all the programs tothe page <1>. In addition, the threshold distributions after the secondstage program to the page <1> are susceptible to the inter-cellinterference caused by the second stage program to the page <2>.

On the other hand, in the case of the present embodiment, the thresholddistributions after the first stage program to the page <0> are onlysusceptible to the inter-cell interference caused by the third stageprogram to the page <1>. In addition, the threshold distributions afterthe second stage program to the page <1> are susceptible to theinter-cell interference caused by the first stage program to the page<0> and the second stage program to the page <2>. Further, the thresholddistributions after the second stage program to the page <k> (k=aninteger of 2-84) are susceptible to the inter-cell interference causedby the third stage program to the page <k−1> and the second stageprogram to the page <k+1>.

Therefore, if the influence of the inter-cell interference caused by thethird stage program is not greatly different from the influence of theinter-cell interference caused by the first stage program, the presentembodiment makes it possible to reduce the influence of the inter-cellinterference exerted on the page <0> from the program to the page <1>.

The present embodiment is also applicable to various programming methodsas shown in FIGS. 4A-4C.

Second Embodiment

Next, a data program order in a second embodiment of the presentinvention is described. The present embodiment, similar to the firstembodiment, relates to the flash memory with the data assignment in thecase 1 of FIGS. 4A-4C, and executes data program to the page <0> in oneprogram stage and to other pages <k> (k=an integer of 2-85) in threeprogram stages.

FIG. 7 shows the data program order in the present embodiment, and FIGS.8A and 8B provide diagrams showing the inter-cell interference effect inthe data program order of FIG. 7. In FIGS. 8A and 8B the inter-cellinterference effects on the pages <k> (k=an integer of 2-85) are similarto FIG. 20C and omitted therefrom.

Firstly, in the first programming, the first stage program is executedto the page <1> other than the page <0> closest to the selection gatetransistor S1.

Subsequently, in the second programming, the first stage program isexecuted to the page <0> closest to the selection gate transistor S1. Asa result, the threshold distributions after the first stage program tothe page <1> adjacent to the page <0> fluctuate in accordance with theinter-cell interference as shown in FIG. 8B.

Subsequently, in the third programming, the first stage program isexecuted to the page <2>. As a result, the threshold distributions afterthe first stage program to the page <1> adjacent to the page <2>fluctuate in accordance with the inter-cell interference as shown inFIG. 8B.

Subsequently, in the fourth programming, the second stage program isexecuted to the page <1>. As a result, the threshold distributions afterthe first stage program to the page <0> adjacent to the page <1> and thethreshold distributions after the first stage program to the page <2>fluctuate in accordance with the inter-cell interference as shown inFIGS. 8A and 21C.

As for the 5-256th programming, they are similar to those in thecomparison example shown in FIG. 19 and accordingly omitted from thefollowing description.

Thus, in the present embodiment, the threshold distributions after thefirst stage program to the page <0> are only susceptible to theinter-cell interference caused by the second stage and third stageprogram to the page <1>. In addition, the threshold distributions afterthe second stage program to the page <1> are susceptible to theinter-cell interference caused by the second stage program to the page<2>.

Therefore, the present embodiment makes it possible to reduce theinfluence of the inter-cell interference exerted on the page <0> by theinter-cell interference caused by the first stage program to the page<1>, when compared with the comparison example shown in FIG. 19.

Third Embodiment

Next, a data program order in a third embodiment of the presentinvention is described. The present embodiment relates to the flashmemory with the data assignment in the case 2 of FIGS. 4A-4C, andexecutes data program to the page <85> in one program stage and executesdata program to other pages <k> (k=an integer of 0-84) in three programstages.

FIG. 9 shows the data program order in the present embodiment, and FIGS.10A and 10B provide diagrams showing the inter-cell interference effectin the data program order of FIG. 9. In FIG. 9 the inter-cellinterference effects on the pages <0>-<83> are similar to FIG. 20C andomitted therefrom.

Firstly, in the first programming, the first stage program is executedto the page <0>.

Subsequently, in the second programming, the second stage program isexecuted to the page <1>. As a result, the threshold distributions afterthe first stage program to the page <0> adjacent to the page <1>fluctuate in accordance with the inter-cell interference as shown inFIG. 20C.

Subsequently, in the third programming, the second stage program isexecuted to the page <0>. As a result, the threshold distributions afterthe first stage program to the page <1> adjacent to the page <0>fluctuate in accordance with the inter-cell interference as shown inFIG. 20C.

Subsequently, in the 4-255th programming, the first stage program to thepage <k>, the second stage program to the page <k−1>, and the thirdstage program to the page <k−2> are executed in order within a range ofk=5-85. As a result, the threshold distributions after the i-th (i=1-3)stage program to the certain page <k> fluctuate in accordance with theinter-cell interference caused by the (i+1)-th (except i=3) stageprogram to the page <k−1> and the i-th stage program to the page <k+1>as shown in FIG. 20C.

Finally, in the 256th programming, the third stage program is executedto the page <84> other than the page <85> closest to the selection gatetransistor S2. As a result, the threshold distributions after the thirdstage program to the page <83> adjacent to the page <84> and thethreshold distributions after the first stage program to the page <85>fluctuate in accordance with the inter-cell interference as shown inFIGS. 20C and 10A.

The present embodiment makes it possible to equalize the inter-cellinterferences exerted on the pages <0>-<83> and on the page <84> exceptthe inter-cell interference caused by the second, third stage program tothe page <k+1>. In a word, it is possible to add the page <85> for 1 bitstorage without exerting the influence on the threshold distributionsafter the program stages to the pages <0>-<84>. As for the page <85>, itis only susceptible to the inter-cell interference caused by the secondstage and third stage program to the page <84>, and not susceptible tothe inter-cell interference caused by the first stage program to theadjacent page as the page <0> in the comparison example of FIG. 19.

Fourth Embodiment

Next, a data program order in a fourth embodiment of the presentinvention is described. The present embodiment, similar to the thirdembodiment, relates to the flash memory with the data assignment in thecase 2 of FIGS. 4A-4C, and executes data program to the page <85> in oneprogram stage and executes data program to other pages <k> (k=an integerof 0-84) in three program stages.

FIG. 11 shows the data program order in the present embodiment, andFIGS. 12A and 12B provide diagrams showing the inter-cell interferenceeffect in the data program order of FIG. 11. In FIGS. 12A and 12B theinter-cell interference effects on the pages <0>-<83> are similar toFIG. 20C and omitted therefrom.

As for the 1-252nd programming, they are similar to those in the thirdembodiment shown in FIG. 9 and accordingly omitted from the followingdescription.

Subsequently, in the 253rd programming, the second stage program isexecuted to the page <84>. As a result, the threshold distributionsafter the second stage program to the page <83> adjacent to the page<84> fluctuate in accordance with the inter-cell interference as shownin FIG. 20C.

Subsequently, in the 254th programming, the third stage program isexecuted to the page <83>. As a result, the threshold distributionsafter the third stage program to the page <82> adjacent to the page <83>and the threshold distributions after the second stage program to thepage <84> fluctuate in accordance with the inter-cell interference asshown in FIG. 20C.

Subsequently, in the 255th programming, the first stage program isexecuted to the page <85> closest to the selection gate transistor S2.As a result, the threshold distributions after the second stage programto the page <84> adjacent to the page <85> fluctuate in accordance withthe inter-cell interference as shown in FIG. 12B.

Finally, in the 256th programming, the third stage program is executedto the page <84> other than the page <85> closest to the selection gatetransistor S2. As a result, the threshold distributions after the thirdstage program to the page <83> adjacent to the page <84> and thethreshold distributions after the first stage program to the page <85>fluctuate in accordance with the inter-cell interference as shown inFIGS. 20C and 12A.

Thus, in the case of the present embodiment, the threshold distributionsafter the first stage program to the page <85> and the thresholddistributions after the second stage program to the page <84> aredifferently susceptible to the inter-cell interference, when comparedwith the fourth embodiment.

In the case of the fourth embodiment, the threshold distributions afterthe first stage program to the page <85> are susceptible to theinter-cell interference caused by the second stage and third stageprogram to the page <84>. In addition, the threshold distributions afterthe second stage program to the page <84> are susceptible to theinter-cell interference caused by the third stage program to the page<83>.

On the other hand, in the case of the present embodiment, the thresholddistributions after the first stage program to the page <85> aresusceptible to the inter-cell interference caused by the third stageprogram to the page 84. In addition, the threshold distributions afterthe second stage program to the page <84> are susceptible to theinter-cell interference caused by the first stage program to the page<85> and the third stage program to the page <83>. In general, thethreshold distributions after the second stage program to the page <k>(k=an integer of 1-83) are susceptible to the inter-cell interferencecaused by the third stage program to the page <k−1> and the second stageprogram to the page <k+1>.

Therefore, if the influence of the inter-cell interference caused by thesecond stage program is not greatly different from the influence of theinter-cell interference caused by the first stage program, the presentembodiment makes it possible to reduce the influence of the inter-cellinterference exerted on the page <85> from the program to the page <84>.

Fifth Embodiment

Next, a data program order in a fifth embodiment of the presentinvention is described. The present embodiment relates to the flashmemory with the data assignment in the case 3 of FIGS. 4A-4C, andexecutes data program to the pages <0> and <85> in two program stagesand executes data program to other pages <k> (k=an integer of 1-84) inthree program stages.

Firstly, prior to description of the data program order, thresholddistribution examples in the memory cells MC when 2-bit data program isexecuted in two program stages are described with reference to FIGS. 13Aand 13B.

The memory cells MC have been block-erased previously to bring thethresholds of all memory cells MC in the block to the lowermost “0”level.

In the case of FIG. 13A, in the first stage program (1st stage), L pageprogram is executed to pull up the threshold of L page data “0” to “1”.In FIGS. 13A and 13B, L page data “0” and “1” corresponds to binary data1 and 0, respectively.

Thereafter, in the second stage program (2nd stage), U page program isexecuted in accordance with L page data “0” or “1” to generate thresholddistributions of U page data “0” or “1”, “2”, “3”. In FIGS. 13A and 13B,M page data “0”, “1”, “2” and “3” corresponds to binary data 11, 01, 00and 10, respectively.

In the case of FIG. 13B, in the first stage program (1st stage), L pageand U page rough program is executed, thereby generating thresholddistributions of U page data “0”-“3” in accordance with the thresholddistribution of L page data “0”. At this time, the thresholddistributions of U page data “1”-“3” overlap adjacent thresholddistributions, respectively.

Then, in the second stage program (2nd stage), L page and U page fineprogram is executed, thereby narrowing the threshold distributions of Upage data “1”-“3” overlapped after the first stage program to separatethem definitely.

In either of FIGS. 13A and 13B, the threshold distributions in thememory cell MCk after the program are widened under the inter-cellinterference effect caused by programs to be executed later to adjacentmemory cells MCk−1 and MCk+1. This effect can be corrected, however, tosome extent by the subsequent program to the memory cell MCk. On theother hand, the influence exerted from one inter-cell interferencediffers in accordance with the number of program stages for adjacentmemory cells MCk−1 and MCk+1. For example, in either of FIGS. 13A and13B, with respect to the second stage program, the applied electricalenergy is relatively low. Therefore, the influence of the inter-cellinterference caused by the program becomes relatively lower than that atthe time of programming in the first stage.

Next, a data program order in a flash memory of an example forcomparison with the present embodiment is described. FIG. 21 shows thedata program order in the comparison example, and FIGS. 22A and 22Bprovide diagrams showing the inter-cell interference effect in the dataprogram order of FIG. 21. In FIGS. 22A and 22B the inter-cellinterference effects on the pages <2>-<85> are similar to FIG. 20C andomitted therefrom.

Firstly, in the first programming, the first stage program is executedto the page <1> closest to the selection gate transistor S1.

Subsequently, in the second programming, the first stage program isexecuted to the page <1>. As a result, the threshold distributions afterthe first stage program to the page <0> adjacent to the page <1>fluctuate in accordance with the inter-cell interference as shown inFIG. 22A.

Subsequently, in the third programming, the second stage program isexecuted to the page <0>. As a result, the threshold distributions afterthe first stage program to the page <1> adjacent to the page <0>fluctuate in accordance with the inter-cell interference as shown inFIG. 22B.

Subsequently, in the fourth programming, the first stage program isexecuted to the page <2>. As a result, the threshold distributions afterthe first stage program to the page <1> adjacent to the page <2>fluctuate in accordance with the inter-cell interference as shown inFIG. 22B.

Subsequently, in the fifth programming, the second stage program isexecuted to the page <1>. As a result, the threshold distributions afterthe second stage program to the page <0> adjacent to the page <1> andthe threshold distributions after the first stage program to the page<2> fluctuate in accordance with the inter-cell interference as shown inFIGS. 22A and 20C.

Subsequently, in the 6-254th programming, the first stage program to thepage <k>, the second stage program to the page <k−1> and the third stageprogram to the page <k−2> are executed in order within a range ofk=3-85. As a result, the threshold distributions after the i-th (i=1-3)stage program to the certain page <k> fluctuate in accordance with theinter-cell interference caused by the (i+1)-th (except i=3) stageprogram to the page <k−1> and the i-th stage program to the page <k+1>as shown in FIG. 20C.

Subsequently, in the 255th programming, the second stage program isexecuted to the page <85> closest to the selection gate transistor S2.As a result, the threshold distributions after the second stage programto the page <84> adjacent to the page <85> fluctuate in accordance withthe inter-cell interference as shown in FIG. 20C.

Finally, in the 256th programming, the third stage program is executedto the page <84> other than the page <85> closest to the selection gatetransistor S2. As a result, the threshold distributions after the thirdstage program to the page <83> adjacent to the page <84> and thethreshold distributions after the second stage program to the page <85>fluctuate in accordance with the inter-cell interference as shown inFIG. 20C.

The following description is given to the data program order in thefifth embodiment of the present invention. FIG. 14 shows the dataprogram order in the present embodiment, and FIGS. 15A and 15B providediagrams showing the inter-cell interference effect in the data programorder of FIG. 14. In FIG. 14 the inter-cell interference effects on thepages <2>-<85> are similar to FIG. 20C and omitted therefrom.

Firstly, in the first programming, the first stage program is executedto the page <1> other than the page <0> closest to the selection gatetransistor S1.

Subsequently, in the second programming, the first stage program isexecuted to the page <0> closest to the selection gate transistor S1. Asa result, the threshold distributions after the first stage program tothe page <1> adjacent to the page <0> fluctuate in accordance with theinter-cell interference as shown in FIG. 15B.

Subsequently, in the 3-254th programming, the first stage program to thepage <k>, the second stage program to the page <k−1> and the third stageprogram to the page <k−2> are executed in order within a range ofk=2-85. As a result, the threshold distributions after the i-th (i=1-3)stage program to the certain page <k> fluctuate in accordance with theinter-cell interference caused by the (i+1)-th (except i=3) stageprogram to the page <k−1> and the i-th stage program to the page <k+1>as shown in FIG. 20C.

As for the subsequent 255-256th programming, they are similar to thosein the comparison example shown in FIG. 21 and accordingly omitted fromthe following description.

Thus, in the case of the present embodiment, the threshold distributionsafter the second stage program to the page <0> and the thresholddistributions after the second stage program to the page <1> aredifferently susceptible to the inter-cell interference in particular,when compared with the comparison example.

In the case of the comparison example shown in FIG. 21, the thresholddistributions after the second stage program to the page <0> aresusceptible to the inter-cell interference caused by the second stageand third stage program to the page <1>. In addition, the thresholddistributions after the second stage program to the page <1> aresusceptible to the inter-cell interference caused by the second stageprogram to the page <2>.

On the other hand, in the case of the present embodiment, the thresholddistributions after the second stage program to the page <0> aresusceptible to the inter-cell interference caused by the third stageprogram to the page <1>. In addition, the threshold distributions afterthe second stage program to the page <1> are susceptible to theinter-cell interference caused by the second stage program to the page<0> and the second stage program to the page <2>. In general, thethreshold distributions after the second stage program to the page <k>(k=an integer of 2-84) are susceptible to the inter-cell interferencecaused by the third stage program to the page <k−1> and the second stageprogram to the page <k+1>.

Therefore, if the influence of the inter-cell interference caused by thesecond stage program to the page <0> is not greatly different from theinfluence of the inter-cell interference caused by the third stageprogram to the pages <1>-<84> that store 3 bits in each memory cell MC,the present embodiment makes it possible to reduce the influence of theinter-cell interference exerted on the page <0> from the program to thepage <1> by the inter-cell interference caused by the second stageprogram to the page <1>, when compared with the comparison example shownin FIG. 21.

Sixth Embodiment

Next, a data program order in a sixth embodiment of the presentinvention is described. The present embodiment relates to the flashmemory with the data assignment in the case 1 of FIGS. 4A-4C, andexecutes data program to the page <0> in one program stage and executesdata program to other pages <k> (k=an integer of 1-84) in two programstages.

Firstly, prior to description of the data program order, thresholddistribution examples in the memory cells MC when 3-bit data program isexecuted in two program stages are described with reference to FIG. 16.

The memory cells MC have been block-erased previously to bring thethresholds of all memory cells MC in the block to the lowermost “0”level.

In the first stage program (1st stage), L page, M page and U page roughprogram is executed, thereby generating U page data “0”-“7” inaccordance with L page data “0”. At this time, the thresholddistributions of U page data “1”-“7” overlap adjacent thresholddistributions, respectively.

Then, in the second stage program (2nd stage), L page, M page and U pagefine program is executed, thereby narrowing the threshold distributionsof U page data “1”-“7” overlapped after the first stage program toseparate them definitely.

The following description is given to a data program order for the flashmemory configured as above.

First, prior to description of the data program order in the presentembodiment, a data program order for a flash memory in a comparisonexample is described. FIG. 23 shows the data program order in thecomparison example, and FIGS. 24A-24C provide diagrams showing theinter-cell interference effect in the data program order of FIG. 23.

Firstly, in the first programming, the first stage program is executedto the page <0> closest to the selection gate transistor S1.

Subsequently, in the second programming, the first stage program isexecuted to the page <1>. As a result, the threshold distributions afterthe first stage program to the page <0> adjacent to the page <1>fluctuate in accordance with the inter-cell interference as shown inFIG. 24A.

Subsequently, in the third programming, the first stage program isexecuted to the page <2>. As a result, the threshold distributions afterthe first stage program to the page <1> adjacent to the page <2>fluctuate in accordance with the inter-cell interference as shown inFIG. 24B.

Subsequently, in the fourth programming, the second stage program isexecuted to the page <1>. As a result, the threshold distributions afterthe first stage program to the page <0> adjacent to the page <1> and thethreshold distributions after the first stage program to the page <2>fluctuate in accordance with the inter-cell interference as shown inFIGS. 24A and 24C.

Subsequently, in the 5-170th programming, the first stage program to thepage <k> and the second stage program to the page <k−1> are executed inorder within a range of k=2-85. As a result, the threshold distributionsafter the i-th (i=1,2) stage program to the certain page <k> fluctuatein accordance with the inter-cell interference caused by the (i+1)-th(except i=2) stage program to the page <k−1> and the i-th stage programto the page <k+1> as shown in FIG. 24C.

Finally, in the 171st programming, the second stage program to the page<85> closest to the selection gate transistor. As a result, thethreshold distributions after the second stage program to the page <84>adjacent to the page <85> fluctuate in accordance with the inter-cellinterference as shown in FIG. 24C.

The following description is given to the data program order in thesixth embodiment of the present invention. FIG. 17 shows the dataprogram order in the present embodiment, and FIGS. 18A and 18B providediagrams showing the inter-cell interference effect in the data programorder of FIG. 17. In FIGS. 18A and 18B the inter-cell interferenceeffects on the pages <0>-<83> are similar to FIG. 24C and omittedtherefrom.

Firstly, in the first programming, the first stage program is executedto the page <1> other than the page <0> closest to the selection gatetransistor S1.

Subsequently, in the second programming, the first stage program isexecuted to the page <0> closest to the selection gate transistor S1. Asa result, the threshold distributions after the first stage program tothe page <1> adjacent to the page <0> fluctuate in accordance with theinter-cell interference as shown in FIG. 18B.

Subsequently, in the third programming, the second stage program isexecuted to the page <0>. As a result, the threshold distributions afterthe first stage program to the page <1> adjacent to the page <0>fluctuate in accordance with the inter-cell interference as shown inFIG. 18B.

As for the subsequent 3-171st programming, they are similar to those inthe comparison example shown in FIG. 23 and omitted from the followingdescription.

In the present embodiment, the memory cell MC0 in the page <0> closestto the selection gate transistor S1 is designed to have the number ofstorage bits equal to 1 bit, thereby improving the disturbcharacteristic at the time of programming.

In the case of the comparison example shown in FIG. 23, the thresholddistributions after the first stage program to the page <0> aresusceptible to the inter-cell interference caused by the first stage andsecond stage program to the page <1>. In addition, the thresholddistributions after the first stage program to the page <1> are onlysusceptible to the inter-cell interference caused by the first stageprogram to the page <2>.

On the other hand, in the case of the present embodiment, the thresholddistributions after the first stage program to the page <0> are onlysusceptible to the inter-cell interference caused by the second stageprogram to the page <1>. In addition, the threshold distributions afterthe first stage program to the page <1> are susceptible to theinter-cell interference caused by the first stage program to the page<2> and the first stage program to the page <0>. In general, thethreshold distributions after the first stage program to the page <k>(k=an integer of 2-85) are susceptible to the inter-cell interferencecaused by the second stage program to the page <k−1> and the first stageprogram to the page <k+1>.

Therefore, if the influence of the inter-cell interference caused by thefirst stage program to the page <0> is not greatly different from theinfluence of the inter-cell interference caused by the second stageprogram to the pages <1>-<85> that store 3 bits in each memory cell MC,the present embodiment makes it possible to reduce the influence of theinter-cell interference exerted on the page <0> from the program to thepage <1> by the influence of the inter-cell interference caused by thefirst stage program to the page <1>, when compared with the comparisonexample shown in FIG. 23.

Others

The embodiments of the invention have been described above though thepresent invention is not limited to these but rather can be givenvarious modifications, additions and so forth without departing from thescope and spirit of the invention.

The nonvolatile memories according to the above embodiments all comprisethe memory cells having the floating gate as the charge storage layerthough they may also comprise memory cells of the charge trap typehaving an insulator film as the charge storage layer, for example, suchas a MONOS structure, to exert the same effect as the above embodiments.

The above embodiments are also applicable to the ABL (All-Bit-Line)access system and the shield bit line access system. For example, if theshield bit line access system is selected, program may be executed to aneven bit line and to an odd bit line in order on page access in eachdata program order.

The ABL access system can program memory cells between adjacent bitlines at the same time, when compared with the shield bit line accesssystem. Accordingly, it can reduce the inter-cell interference betweenadjacent bit lines.

Data write may be executed by the shield bit line access and data readby the ABL access system to exert the same effect. In this case, toexert the same effect, various combinations of orders may be applied,such as (1) program to an even bit line, program to an odd bit line,verify to ABL; (2) program to an even bit line, verify to ABL, programto an odd bit line; (3) program/verify to an even bit line/an odd bitline; or (4) verify/program to an even bit line/an odd bit line.

What is claimed is:
 1. A nonvolatile semiconductor memory device,comprising: a cell unit including: a first selection gate transistor, asecond selection gate transistor; and a plurality of serially-connectedmemory cells provided between the first selection gate transistor andthe second selection gate transistor; and a data write circuitconfigured to execute a writing operation to write data to the memorycells; wherein the memory cells include: a first memory cell connectedwith a first word line and capable of being programmed in one stage andstoring data of one bit, a second memory cell connected with a secondword line and capable of being programmed in multi-stages and storingdata of three bits, the second memory cell being closer to the firstselection gate transistor as compared with the first memory cell, athird memory cell connected with a third word line and capable of beingprogrammed in the multi-stages and storing data of three bits, the thirdmemory cell being closer to the first selection gate transistor ascompared with the second memory cell, and a fourth memory cell connectedwith a fourth word line and capable of being programmed in themulti-stages and storing data of three bits; the fourth memory cellbeing closer to the first selection gate transistor as compared with thethird memory cell; and the data write circuit executes: a first programon the third memory cell as a non-final stage of the multi-stages, asecond program on the fourth memory cell as a final stage of themulti-stages, after the first program, a third program on the secondmemory cell as the non-final stage of the multi-stages, after the secondprogram, a fourth program on the third memory cell as the final stage ofthe multi-stages, after the third program, a fifth program on the firstmemory cell as the one stage, after the fourth program, and a sixthprogram on the second memory cell as the final stage of themulti-stages, after the fifth program.
 2. The nonvolatile semiconductormemory device according to claim 1, wherein the memory cells furtherinclude: a fifth memory cell connected with a fifth word line andcapable of being programmed in the multi-stages and storing data ofthree bits, the fifth memory cell being closer to the first selectiongate transistor as compared with the fourth memory cell; and the datawrite circuit further executes a seventh program on the fifth memorycell as the final stage of the multi-stages, before the first program,and an eighth program on the fourth memory cell as the non-final stageof the multi-stages, before the seventh program.
 3. The nonvolatilesemiconductor memory device according to claim 2, wherein themulti-stages includes a first stage, a second stage, and a third stage,and the non-final stage is the second stage, and the final stage is thethird stage.
 4. The nonvolatile semiconductor memory device according toclaim 3, wherein the data write circuit further executes a ninth programon the third memory cell as the first stage of the multi-stages, beforethe eighth program, and a tenth program on the second memory cell as thefirst stage of the multi-stages, after the seventh program and beforethe first program.
 5. The nonvolatile semiconductor memory deviceaccording to claim 1, wherein the cell unit further includes: a firstdummy cell having a structure same as one of the memory cells betweenthe second selection gate transistor and the first memory cell, and asecond dummy cell having a structure same as one of the memory cellsbetween the first selection gate transistor and the fourth memory cell.6. The nonvolatile semiconductor memory device according to claim 1,further comprising: a source line connected to a source of the firstselection gate transistor; and a bit line connected to a drain of thesecond selection gate transistor.
 7. A nonvolatile semiconductor memorydevice, comprising: a cell unit including: a first selection gatetransistor, a second selection gate transistor; and a plurality ofserially-connected memory cells provided between the first selectiongate transistor and the second selection gate transistor; and a datawrite circuit configured to execute a writing operation to write data tothe memory cells; wherein the memory cells include: a first memory cellconnected with a first word line and capable of being storing data oftwo bits, a second memory cell connected with a second word line andcapable of storing data of three bits, the second memory cell beingcloser to the first selection gate transistor as compared with the firstmemory cell, a third memory cell connected with a third word line andcapable of storing data of three bits, the third memory cell beingcloser to the first selection gate transistor as compared with thesecond memory cell, a fourth memory cell connected with a fourth wordline and capable of storing data of three bits, the fourth memory cellbeing closer to the first selection gate transistor as compared with thethird memory cell, and a fifth memory cell connected with a fifth wordline and capable of storing data of three bits, the fifth memory cellbeing closer to the first selection gate transistor as compared with thefourth memory cell; and the data write circuit executes: a first programon the fourth memory cell as a non-final one of stages for writing threebits, a second program on the fifth memory cell as a final one of stagesfor writing three bits, after the first program, a third program on thethird memory cell as the non-final one stages for writing three bits,after the second program, a fourth program on the fourth memory cell asthe final one of stages for writing three bits, after the third program,a fifth program on the second memory cell as the non-final one of stagesfor writing three bits, after the fourth program, a sixth program on thefirst memory cell as a final one of stages for writing two bits, afterthe fifth program, and a seventh program on the second memory cell asthe final one of stages for writing three bits, after the sixth program.8. The nonvolatile semiconductor memory device according to claim 7,wherein the data write circuit further executes an eighth program on thefirst memory cell as a non-final one of stages for writing two bits,after the fourth program and before the fifth program.
 9. Thenonvolatile semiconductor memory device according to claim 8, whereinthe three bits are written in first to third stages, among which thethird stage corresponds to the final one, and the second stagecorresponds to the non-final one, and the two bits are written in firstand second stages, among which the second stage corresponds to the finalone, and the first stage corresponds to the non-final one.
 10. Thenonvolatile semiconductor memory device according to claim 9, whereinthe data write circuit further executes a ninth program on the thirdmemory cell as the first stage for writing three bits, before the firstprogram, and a tenth program on the second memory cell as the firststage for writing three bits, after the second program before the thirdprogram.
 11. The nonvolatile semiconductor memory device according toclaim 7, wherein the cell unit further includes: a first dummy cellhaving a structure same as one of the memory cells between the secondselection gate transistor and the first memory cell, and a second dummycell having a structure same as one of the memory cells between thefirst selection rate transistor and the fifth memory cell.
 12. Thenonvolatile semiconductor memory device according to claim 7, furthercomprising: a source line connected to a source of the first selectiongate transistor; and a bit line connected to a drain of the secondselection gate transistor.